MEMS Shear Sensor.

Torres, Daniela A.

2016

Description
  • A MEMS shear sensor with 2D shear stress measurement capability has been designed and fabricated at the Tufts Micro and Nano Fabrication Lab. Design differences between these sensors and a previous generation of shear sensors is explored, as well as the effects of changing various process parameters throughout fabrication of the device. The optimization and study of this 4 layer surface micro mach... read more
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