Harmonic Generation in Microwave Microplasma
generation in microplasmas is explored theoretically and experimentally, and then
compared with a 2D fluid model. A microstrip split ring resonator with 150 μm gap
is designed to provide a microplasma source at around 1 GHz. Electrode area asymmetry is
a known factor in harmonic generation in plasmas and is explored. Gas pressures of 0.2
Torr to 760 Torr in argon with power ... read morelevels of 0.5 to 3 W are examined. Experimental
results show third harmonic output of greater than 10 mW is achieved with 3 W of net
input power in 0.3 Torr of argon and with asymmetric electrode areas. Experimental
results of a microstrip split ring resonator in a frequency mixer configuration are also
shown. Fluid model simulations of Gregorio reveal that the small electrode area of an
asymmetric discharge forces a higher voltage, which strongly modulates the sheath width
and creates hot electrons. A nonlinear voltage-capacitance relationship, as well as hot
electrons causing large conduction current spikes, are the sources of harmonic current
in the plasma. Results of experiments and fluid model simulations are compared and are
found to compare reasonably well.
Thesis (M.S.)--Tufts University, 2016.
Submitted to the Dept. of Electrical Engineering.
Advisor: Jeffrey Hopwood.
Committee: Alan Hoskinson, and Fiorenzo Omenetto.
Keywords: Plasma physics, Electrical engineering, and Electromagnetics.read less