Harmonic Generation in Microwave Microplasma

Parsons, Stephen.


  • Abstract: Harmonic generation in microplasmas is explored theoretically and experimentally, and then compared with a 2D fluid model. A microstrip split ring resonator with 150 μm gap is designed to provide a microplasma source at around 1 GHz. Electrode area asymmetry is a known factor in harmonic generation in plasmas and is explored. Gas pressures of 0.2 Torr to 760 Torr in argon with power leve... read more
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