Multiphysics model investigating performance of a micromachined floating element shear stress sensor.

White, Robert D.

Kastor, Nikolas.

Zhao, Zhengxin.

2017.

Description
  • A MEMS floating element shear stress sensor has been developed for flow testing applications, targeted primarily at ground and flight testing of aerospace vehicles and components. A comprehensive numerical model of this sensor is described in this paper, quantifying the behavior of the mechanical components, fluid interaction, and electrostatics in three, non-coupled, 3-D numerical simulations: 1)... read more
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  • Kastor, Nikolas, Zhengxin Zhao, and Robert D. White. "Multiphysics Model Investigating Performance of a Micromachined Floating Element Shear Stress Sensor." Sensors and Actuators A: Physical 269 (January 2018): 1-13. doi:10.1016/j.sna.2017.11.004.
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