MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer.

Krause, Joshua.

White, Robert D.

Moeller, Mark J.

De Jong, Richard.

2009.

Description
  • The second stage of the design, fabrication, and characterization of a surface micro-machined, front-vented, 64 channel (8 8), capacitively sensed pressure sensor array is described. The array was fabricated using the MEMSCAP PolyMUMPs R process, a three layer polysilicon surface micromachining process with an additional fabrication step using Parylene-C. An acoustic lumped element model was used ... read more
This object is in collection Subject Permanent URL Citation
  • Krause, Joshua, Robert White, Mark Moeller, and Richard De Jong. "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer." AIAA Infotech@Aerospace Conference (April 6, 2009). doi:10.2514/6.2009-1905.
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ms35tm68q
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