Micromachined Nickel Floating Element Shear Stress Sensor Array.

Zhao, Zhengxin.

Gallman, Judith M.

White, Robert D.


  • This paper describes the design, fabrication, characterization and packaging of a 256 element MEMS floating element shear stress sensor array-on-a-chip. This device is targeted at measuring time resolved fine spatial scale shear stress beneath the turbulent boundary layer (TBL) for aerospace applications. The differential measurement shows a sensitivity of 0.08 mV/Pa at 0.27 mV/Hz". The linear ran... read more
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  • Zhao, Zhengxin, Judith Gallman, and Robert White. "Micromachined Nickel Floating Element Shear Stress Sensor Array." ECS Transactions 41 no. 20 (2012). doi:10.1149/1.3687434.
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