Micromachined Microphone Array on a Chip for Turbulent Boundary Layer Measurements.

Krause, Joshua.


  • Abstract: A surface micromachined microphone array on a single chip has been successfully designed, fabricated, characterized, and tested for aeroacoustic purposes. The microphone was designed to have venting through the diaphragm, 64 elements (8×8) on the chip, and used a capacitive transduction scheme. The microphone was fabricated using the MEMSCAP PolyMUMPs process (a foundry polysilicon ... read more
This object is in collection Creator department Thesis Type Genre Permanent URL
To Cite:
DCA Citation Guide    EndNote