Micromachined Microphone Array on a Chip for Turbulent Boundary Layer Measurements.

Krause, Joshua.


  • Abstract: A surface micromachined microphone array on a single chip has been successfully designed, fabricated, characterized, and tested for aeroacoustic purposes. The microphone was designed to have venting through the diaphragm, 64 elements (8×8) on the chip, and used a capacitive transduction scheme. The microphone was fabricated using the MEMSCAP PolyMUMPs process (a foundry polysilicon surfa... read more
This object is in collection Corporate name Permanent URL
To Cite:
DCA Citation Guide    EndNote