Capacitively sensed micromachined hydrophone with viscous fluid-structure coupling.

White, Robert D.

Cheng, Lei.

Grosh, Karl.


  • This work presents a novel design for a micromachined, capacitively sensed hydrophone. The design consists of a fluid-filled chamber constrained by two sets of membranes. The "input" membranes are arrayed around the outside of the circular chamber. Incoming sound generates a trapped cylindrical wave, creating mechanically amplified motion of the 1 mm diameter central "sensing" membrane. The membrane ... read more
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  • Robert D. White, Lei Cheng, Karl Grosh, "Capacitively sensed micromachined hydrophone with viscous fluid-structure coupling", Proc. SPIE 5718, Microfluidics, BioMEMS, and Medical Microsystems III, (22 January 2005); doi: 10.1117/12.591376;
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