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The second stage of the design, fabrication, and characterization of a surface micromachined, front-vented, 64 channel (8×8), capacitively sensed pressure sensor array is described. The array was fabricated using the MEMSCAP PolyMUMPs R process, a three layer polysilicon surface micromachining process with an additional fabrication step using Parylene-C. An acoustic lumped element model was used t... read more
- Krause, Joshua, Robert White, Mark Moeller, Judith Gallman, Gerard Holup, and Richard DeJong. "MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer." 48th AIAA Aerospace Sciences Meeting Including the New Horizons Forum and Aerospace Exposition (January 4, 2010). doi:10.2514/6.2010-306.