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Abstract: An electronic nose formed from a heterogeneous array of
chemiresistors is presented. The sensor is fabricated in a novel, CMOS-compatible process
by the sequential, dielectrophoretic assembly of a diverse set of chemiresistive
nanomaterials (reduced graphene oxide, carbon nanotubes, and copper oxide nanowires) onto a
silicon chip. Fabrication of the substrate and nanomaterials is det... read moreailed, as well is the
process of sequential dielectrophoretic assembly to integrate the nanomaterials and
substrate. Individually, the sensors show a high degree of sensitivity, demonstrating
fractional changes of resistance of greater than 50% upon exposure to gas vapors. The
entire chip with the ensemble of chemiresistors is shown to be an effective electronic
nose, with distinguishable responses to ammonia, methanol, and toluene.
Thesis (M.S.)--Tufts University, 2013.
Submitted to the Dept. of Electrical Engineering.
Advisor: Sameer Sonkusale.
Committee: Tom Vandervelde, and Mehmet Dokmeci.
Keyword: Electrical engineering.read less
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