Design, modeling, and diagnostics of microplasma generation at microwave frequency.

Miura, Naoto.

2017-04-18T14:01:25.010Z

Description
  • Abstract: Plasmas are partially ionized gases that find wide utility in the processing of materials, especially in integrated circuit fabrication. Most industrial applications of plasma occur in near-vacuum where the electrons are hot (>10,000 K) but the gas remains near room temperature. Typical atmospheric plasmas, such as arcs, are hot and destructive to sensitive materials. Recently the eme... read more
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