MEMS Shear Sensor

Torres, Daniela A.
2016

A MEMS shear sensor with 2D shear stress measurement capability has been designed and fabricated at the Tufts Micro and Nano Fabrication Lab. Design differences between these sensors and a previous generation of shear sensors is explored, as well as the effects of changing various process parameters throughout fabrication of the device. The optimization and study of this 4 layer surface micro ma... read more

This object is in collection:
Undergraduate honors theses
Subjects
Microelectromechanical systems.
Detectors.
Tufts University. Department of Mechanical Engineering.
Permanent URL
http://hdl.handle.net/10427/009638
ID: tufts:sd.0000474
To Cite: DCA Citation Guide
Usage: Detailed Rights