A CMOS-compatible Electronic Nose Fabricated via Dielectrophoretic Assembly of Nanomaterials.

MacNaughton, Sam.

Abstract: An electronic nose formed from a heterogeneous array of chemiresistors is presented. The sensor is fabricated in a novel, CMOS-compatible process by the sequential, dielectrophoretic assembly of a diverse set of chemiresistive nanomaterials (reduced graphene oxide, carbon nanotubes, and copper oxide nanowires) onto a silicon chip. Fabrication of the substrate and nanomaterials is detaile... read more

Tufts University. Department of Electrical and Computer Engineering.
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