Design, modeling, and diagnostics of microplasma generation at microwave frequency.

Miura, Naoto.

Abstract: Plasmas are partially ionized gases that find wide utility in the processing of materials, especially in integrated circuit fabrication. Most industrial applications of plasma occur in near-vacuum where the electrons are hot (>10,000 K) but the gas remains near room temperature. Typical atmospheric plasmas, such as arcs, are hot and destructive to sensitive materials. Recently the eme... read more

Tufts University. Department of Electrical and Computer Engineering.
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ID: tufts:20929
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