Micromachined Microphone Array on a Chip for Turbulent Boundary Layer Measurements.

Krause, Joshua.
2017-04-18T13:58:58.584Z

Abstract: A surface micromachined microphone array on a single chip has been successfully designed, fabricated, characterized, and tested for aeroacoustic purposes. The microphone was designed to have venting through the diaphragm, 64 elements (8×8) on the chip, and used a capacitive transduction scheme. The microphone was fabricated using the MEMSCAP PolyMUMPs process (a foundry polysilicon surfa... read more

Subjects
Tufts University. Department of Mechanical Engineering.
Permanent URL
http://hdl.handle.net/10427/011421
ID: tufts:20895
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