High-throughput heterogeneous integration of diverse nanomaterials on a single chip for sensing applications.

Sonkusale, Sameer.
MacNaughton, Samuel.
Ammu, Srikanth.
Manohar, Sanjeev.

There is a large variety of nanomaterials each with unique electronic, optical and sensing properties. However, there is currently no paradigm for integration of different nanomaterials on a single chip in a low-cost high-throughput manner. We present a high throughput integration approach based on spatially controlled dielectrophoresis executed sequentially for each nanomaterial type to realize a... read more

Nanostructured materials.
Integrated circuits.
Tufts University. Department of Electrical and Computer Engineering.
Permanent URL
Original publication
MacNaughton S, Ammu S, Manohar SK, Sonkusale S (2014) High-Throughput Heterogeneous Integration of Diverse Nanomaterials on a Single Chip for Sensing Applications. PLoS ONE 9(10): e111377. doi:10.1371/journal.pone.0111377
ID: tufts:18337
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